Mixing ratio detection (built-in)

detection object

C₄F₇N / CO₂ / O₂ 、 C₄F₇N / N₂ / O₂ 、 SF₆ / N₂ 、 SF₆ / CF_{4 、}CO₂ / O₂

Detection range

0～100%(mol/mol)

detection accuracy

±0.3%(mol/mol)

resolution

±0.01%(mol/mol)

Compressor (without oil)

outlet pressure

≥3.0MPa

recovery speed

≥24m³/h

Vacuum pump

type

Two-stage rotary vane vacuum pump with anti-return oil solenoid valve.

Vacuum flow rate

≥100m³/h

ultimate vacuum

≤10Pa

Equipped with a digital vacuum meter to monitor the vacuum level

Vacuum compressor

recovery rate

≥ 24m³/h

Ultimate vacuum recovery

≤100Pa

Gas filling

Valve concentration range

0～100%(mol/mol)

Optional valve gas

C₄F₇N / CO₂ / O₂ 、 C₄F₇N / N₂ / O₂ 、 SF₆ / N₂ 、 SF₆ / CF₄、CO₂ / O₂

Valve accuracy

±0.5%(mol/mol)

tank charging pressure

≥ 1.5 MPa

inflation speed

≥ 15m³/h

Recovery/recharge rate

≥24m³/h

recovery final pressure

≤100Pa

recharge pressure

0~ 1.5MPa (adjustable)